MEMS Materials and Processes Handbook
| dc.contributor.editor | Ghodssi, Reza | |
| dc.date.accessioned | 2019-08-15T07:38:04Z | |
| dc.date.accessioned | 2024-04-22T11:20:59Z | |
| dc.date.available | 2019-08-15T07:38:04Z | |
| dc.date.available | 2024-04-22T11:20:59Z | |
| dc.date.issued | 2011 | |
| dc.identifier.isbn | 978-0-387-47318-5 | |
| dc.identifier.uri | https://drs.ess.gov.et/handle/12345678/78539 | |
| dc.language.iso | en | en_US |
| dc.publisher | Springer Science | en_US |
| dc.subject | Handbook | en_US |
| dc.title | MEMS Materials and Processes Handbook | en_US |
| dc.type | Book | en_US |